In this paper,the firm’s R&D decision is separated into two stages: whether to invest and how much to invest. The influences of government subsidy on R&D decisions in firms with different ownership structures are discussed. Theoretically,a two-stage model of firms’R&D decisions is constructed to investi-gate the mechanism of subsidy on R&D investment. Empirically,using the sample data of Chinese industrial firms,the Heckman two-step method and two-stage least square are used to deal with sample selective bias and endogeneity respectively. The sub-samples of state-owned,private and foreign firms are also tested separately.The results show that under different ownership structures,the influences of government subsidy on firms’ R&D decisions are different. To undertake social responsibility,the state-owned firms usually have a high probability of engaging in R&D activities under preferential policies. However,because of special property re-lations and soft budget constraints,the state-owned firms lack incentives to increase R&D investments. For the well-organized foreign firms and less competitive private firms,the incentive effects of government subsidy on R&D are more obvious.